TY - JOUR A1 - Akhmetov, V. D. A1 - Richter, H. A1 - Seifert, Winfried A1 - Lysytskiy, O. A1 - Wahlich, R. A1 - Müller, T. A1 - Reiche, Manfred T1 - Distribution and properties of oxide precipitates in annealed nitrogen doped 300 mm Si wafers T2 - European Physics Journal of Applied Physics Y1 - 2011 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/6132 SN - 1286-0042 SN - 1286-0050 VL - 27 IS - 1-3 SP - 159 EP - 161 ER -