@article{AkhmetovRichterSeifertetal.2011, author = {V. D. Akhmetov and H. Richter and Winfried Seifert and O. Lysytskiy and R. Wahlich and T. M{\"u}ller and Manfred Reiche}, title = {Distribution and properties of oxide precipitates in annealed nitrogen doped 300 mm Si wafers}, journal = {European Physics Journal of Applied Physics}, volume = {27}, number = {1-3}, pages = {159 -- 161}, year = {2011}, }