TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Eremin, Denis A1 - Brinkmann, Ralf Peter A1 - Schulze, Julian A1 - Schuengel, Edmund A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Hartmann, Peter A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas T2 - Physics of Plasmas Y1 - 2017 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/18020 SN - 1070-664X SN - 1089-7674 VL - 23 IS - 6 SP - 063514 ER -