TY - GEN A1 - Wilczek, Sebastian A1 - Schulze, Julian A1 - Brinkmann, Ralf Peter A1 - Donkó, Zoltan A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Electron dynamics in low pressure capacitively coupled radio frequency discharges T2 - Journal of Applied Physics Y1 - 2020 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/26004 VL - 127 IS - 18 ER -