TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Donko, Zoltan A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas T1 - Disparity between current and voltage driven capacitively coupled radio frequency discharges T2 - Plasma Sources Science and Technology Y1 - 2019 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/23133 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 12 ER -