@misc{StolzMroskKaiseretal.2019, author = {Michael Stolz and Andreas Mrosk and Bert Kaiser and Sergiu Langa and Lutz Ehrig and Holger Conrad and Matthieu Gaudet and Harald Schenk}, title = {Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen}, booktitle = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, url = {https://www.ipms.fraunhofer.de/de/events/2019/mst-kongress.html}, institution = {FG Mikro- und Nanosysteme}, type = {conferenceobject_ref}, pages = {366 -- 369}, year = {2019}, }