TY - CONF A1 - Ho, Min-Chieh A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - FEA of CMUTs suitable for wide gas pressure range applications T2 - 2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010, vol. 2 Y1 - 2012 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/7306 SP - 1234 EP - 1237 PB - IEEE CY - Piscataway, NJ ER -