@inproceedings{HoKupnikKhuriYakub2012, author = {Min-Chieh Ho and Mario Kupnik and Butrus T. Khuri-Yakub}, title = {FEA of CMUTs suitable for wide gas pressure range applications}, booktitle = {2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010, vol. 2}, pages = {1234 -- 1237}, year = {2012}, }