@misc{SchweigerMelnikovKochetal.2022, author = {Severin Schweiger and Anton Melnikov and Sandro G. Koch and Harald Schenk}, title = {Two-Photon Lithography Parameter Study for Manufacturing of Acoustic Metamaterials on MEMS}, booktitle = {MikroSystemTechnik Kongress 2021 : Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen Innovative Produkte f{\"u}r zukunftsf{\"a}hige M{\"a}rkte 08. - 10. November 2021, Stuttgart-Ludwigsburg}, isbn = {978-3-8007-5656-8}, url = {https://www.vde-verlag.de/proceedings-de/455656092.html}, institution = {FG Mikro- und Nanosysteme}, type = {conferenceobject_noref}, pages = {365 -- 368}, year = {2022}, }