@misc{KendaKraftTortschanoffetal.2016, author = {Andreas Kenda and Martin Kraft and Andreas Tortschanoff and Werner Scherf and Thilo Sandner and Harald Schenk and Stephan Luettjohann and Apolline Simon}, title = {Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives}, booktitle = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, isbn = {978-1-62841-038-9}, institution = {FG Mikro- und Nanosysteme}, type = {articlenr}, pages = {910102-1 -- 910102-10}, year = {2016}, }