TY - GEN A1 - Oleynik, Paul A1 - Berkmann, Fritz A1 - Reiter, Sebastian A1 - Schlipf, Jon A1 - Ratzke, Markus A1 - Yamamoto, Yuji A1 - Fischer, Inga Anita T1 - Strong Optical Coupling of Lattice Resonances in a Top-down Fabricated Hybrid Metal–Dielectric Al/Si/Ge Metasurface T2 - Nano Letters N2 - Optical metasurfaces enable the manipulation of the light–matter interaction in ultrathin layers. Compared with their metal or dielectric counterparts, hybrid metasurfaces resulting from the combination of dielectric and metallic nanostructures can offer increased possibilities for interactions between modes present in the system. Here, we investigate the interaction between lattice resonances in a hybrid metal–dielectric metasurface obtained from a single-step nanofabrication process. Finite-difference time domain simulations show the avoided crossing of the modes appearing in the wavelength-dependent absorptance inside the Ge upon variations in a selected geometry parameter as evidence for strong optical coupling. We find good agreement between the measured and simulated absorptance and reflectance spectra. Our metasurface design can be easily incorporated into a top-down optoelectronic device fabrication process with possible applications ranging from on-chip spectroscopy to sensing. KW - metamaterials KW - semiconductors KW - hybridization KW - optoelectronics Y1 - 2024 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/33449 SN - 1530-6984 SN - 1530-6992 VL - 24 IS - 10 SP - 3142 EP - 3149 ER -