@misc{TallaridaWeisheitKolaneketal.2011, author = {Massimo Tallarida and Martin Weisheit and Krzysztof Kolanek and Marcel Michling and Hans-J{\"u}rgen Engelmann and Dieter Schmeißer}, title = {Atomic layer deposition of nanolaminate oxide films on Si}, booktitle = {Journal of Nanoparticle Research}, volume = {13}, number = {11}, doi = {10.1007/s11051-011-0319-x}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, pages = {5975 -- 5983}, year = {2011}, }