@misc{SchenkVillasmuntaSteglichetal.2022, author = {Harald Schenk and Francesco Villasmunta and Patrick Steglich and Sigurd Schrader and Andreas Mai}, title = {Numerical Simulation of Optical Through-Silicon Waveguide for 3D Photonic Interconnections}, booktitle = {2021 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD)}, isbn = {978-1-6654-1276-6}, issn = {2158-3242}, doi = {10.1109/NUSOD52207.2021.9541464}, url = {https://ieeexplore.ieee.org/document/9541464}, institution = {FG Mikro- und Nanosysteme}, type = {conferenceobject_noref}, pages = {2}, year = {2022}, }