@inproceedings{FriedrichMichlingSchmeisseretal.2015, author = {Daniel Friedrich and Marcel Michling and Dieter Schmeißer and Yuri Koval and Paul M{\"u}ller}, title = {Characterization of ion beam modified polyimide layers}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, pages = {S. 247}, url = {http://www.dpg-verhandlungen.de/year/2010/conference/regensburg/part/ds/session/38/contribution/10}, year = {2015}, }