@misc{LukosiusLukoseLiskeretal.2022, author = {Mindaugas Lukosius and RasuolÄ— Lukose and Marco Lisker and G. Luongo and M. Elviretti and Andreas Mai and Christian Wenger}, title = {Graphene Research in 200 mm CMOS Pilot Line}, booktitle = {45th Jubilee International Convention on Information, Communication and Electronic Technology (MIPRO), 2022}, isbn = {978-953-233-103-5}, issn = {2623-8764}, doi = {10.23919/MIPRO55190.2022.9803362}, institution = {FG Halbleitermaterialien}, type = {conferenceobject_ref}, pages = {113 -- 117}, year = {2022}, }