@inproceedings{LinZhuangWodnickietal.2012, author = {Der-Song Lin and Xuefeng Zhuang and Robert Wodnicki and Charles. G. Woychik and {\"O}mer Oralkan and Mario Kupnik and Butrus T. Khuri-Yakub}, title = {Packaging of large and low-pitch size 2D ultrasonic transducer arrays}, booktitle = {IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010}, pages = {508 -- 511}, year = {2012}, }