@inproceedings{KolanekKaravaevTallaridaetal.2015, author = {Krzysztof Kolanek and Konstantin Karavaev and Massimo Tallarida and Dieter Schmeißer}, title = {In-situ investigations of the atomic layer deposition of HfO2 with UHV/AFM}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, pages = {S. 160}, url = {http://www.dpg-verhandlungen.de/year/2009/conference/dresden/part/ds/session/11/contribution/6}, year = {2015}, }