@inproceedings{KolanekTallaridaKaravaevetal.2011, author = {Krzysztof Kolanek and Massimo Tallarida and Konstantin Karavaev and Dieter Schmeißer}, title = {In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, pages = {47 -- 51}, year = {2011}, }