@misc{KolanekTallaridaSchmeisser2011, author = {Krzysztof Kolanek and Massimo Tallarida and Dieter Schmeißer}, title = {Atomic layer deposition of HfO2 investigated in situ by means of a noncontact atomic force microscopy}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2011}, }