@inproceedings{MichlingTallaridaKolaneketal.2015, author = {Marcel Michling and Massimo Tallarida and Krzysztof Kolanek and Dieter Schmeißer}, title = {In-situ EELS and UPS measurements on HfO2 ALD layers}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, url = {http://www.dpg-verhandlungen.de/year/2010/conference/regensburg/part/ds/session/24/contribution/5}, year = {2015}, }