@misc{KolanekTallaridaSchmeisser2013, author = {Krzysztof Kolanek and Massimo Tallarida and Dieter Schmeißer}, title = {Height distribution of atomic force microscopy images as a tool for atomic layer deposition characterization}, booktitle = {Journal of Vacuum Science and Technology : A}, volume = {31}, number = {1}, doi = {10.1116/1.4754557}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, pages = {01A104-1 -- 01A104-9}, year = {2013}, }