@misc{KolanekTallaridaMichlingetal.2011, author = {Krzysztof Kolanek and Massimo Tallarida and Marcel Michling and Konstantin Karavaev and Dieter Schmeißer}, title = {Atomic layer deposition reactor for fabrication of metal oxides}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2011}, }