@misc{KolanekTallaridaKaravaevetal.2011, author = {Krzysztof Kolanek and Massimo Tallarida and Konstantin Karavaev and Dieter Schmeißer}, title = {In situ studies of the atomic layer deposition of thin HfO2 dielectrics by ultra high vacuum atomic force microscope}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2011}, }