@misc{HoZschechSchmeisseretal.2011, author = {Paul S. Ho and Ehrenfried Zschech and Dieter Schmeißer and Moritz Andreas Meyer and Rene Huebner and Meike Hauschildt and Lijuan Zhang and Martin Gall and Matthias Kraatz}, title = {Scaling effects on microstructure and reliability for cu interconnects}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2011}, }