@misc{MeinelKoschwitzHeinemannetal.2017, author = {Birgit Meinel and Tim Koschwitz and Robert Heinemann and J{\"o}rg Acker}, title = {The texturization process during horizontal acidic etching of multi-crystalline silicon wafers}, booktitle = {Materials Science in Semiconductor Processing}, volume = {26}, issn = {1369-8001}, doi = {10.1016/j.mssp.2014.08.047}, url = {http://www.sciencedirect.com/science/article/pii/S136980011400482X}, institution = {FG Physikalische Chemie}, type = {articler}, pages = {695 -- 703}, year = {2017}, }