@inproceedings{HoHoffmannUngeretal.2016, author = {Min-Chieh Ho and Maik Hoffmann and Alexander Unger and Kwan Kyu Park and Mario Kupnik and Butrus T. Khuri-Yakub}, title = {CMUTs in Permanent Contact Operation for High Output Pressure}, booktitle = {Proceedings, ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems and ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels}, doi = {10.1115/IPACK2015-48733}, year = {2016}, }