@inproceedings{UngerHoffmannHoetal.2013, author = {Alexander Unger and Maik Hoffmann and Min-Chieh Ho and Kwan Kyu Park and Butrus T. Khuri-Yakub and Mario Kupnik}, title = {Finite element analysis of mechanically amplified CMUTs}, booktitle = {Proceedings, 2013 IEEE International Ultrasonics Symposium}, pages = {287 -- 290}, doi = {10.1109/ULTSYM.2013.0074}, year = {2013}, }