@inproceedings{SandnerGrashoffSchenketal.2013, author = {Thilo Sandner and Thomas Grashoff and Harald Schenk and Andreas Kenda}, title = {Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, pages = {82520C-1 -- 82520C-10}, doi = {10.1117/12.909817}, year = {2013}, }