TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Gaumont, E. A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2015 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/13699 SN - 1932-5134 VL - 13 IS - 1 SP - 011115-1 EP - 011115-14 ER -