@misc{SandnerGrashoffGaumontetal.2015, author = {Thilo Sandner and Thomas Grashoff and E. Gaumont and Harald Schenk and Andreas Kenda}, title = {Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers}, booktitle = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, number = {1}, issn = {1932-5134}, institution = {FG Mikro- und Nanosysteme}, type = {articlenr}, pages = {011115-1 -- 011115-14}, year = {2015}, }