TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2016 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/15876 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER -