@misc{KaiserGrashoffDrabeetal.2016, author = {Bert Kaiser and Thomas Grashoff and Christian Drabe and Holger Conrad and Harald Schenk}, title = {About stress in filled DRIE-trenches}, booktitle = {Journal of Micromechanics and Microengineering (JMM)}, volume = {25}, number = {8}, issn = {0960-1317}, url = {http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003}, institution = {FG Mikro- und Nanosysteme}, type = {articler}, pages = {8085003}, year = {2016}, }