@inproceedings{SchenkConradGaudetetal.2017, author = {Harald Schenk and Holger Conrad and Matthieu Gaudet and Sebastian Uhlig and Bert Kaiser and Sergiu Langa and Michael Stolz and Klaus Schimmanz}, title = {A novel electrostatic micro-actuator class and its application potential for optical MEMS}, booktitle = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, pages = {Tu 3.11-1 -- Tu 3.11-2}, doi = {10.1109/OMN.2016.7565867}, year = {2017}, }