@misc{EhrigKaiserSchenketal.2021, author = {Lutz Ehrig and Bert Kaiser and Hermann Schenk and Michael Stolz and Sergiu Langa and Holger Conrad and Harald Schenk and Andreas M{\"a}nnchen and Tobias Brocks}, title = {Acoustic validation of electrostatic all-silicon MEMS-speakers}, booktitle = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, doi = {10.17743/aesconf.2019.978-1-942220-29-9}, url = {https://www.aes.org/e-lib/browse.cfm?elib=20522}, institution = {FG Mikro- und Nanosysteme}, type = {conferenceobject_noref}, year = {2021}, }