@misc{EhrigSchenkWalletal.2021, author = {Lutz Ehrig and Hermann Schenk and Franziska Wall and Anton Melnikov and Michael Stolz and Sergiu Langa and Bert Kaiser and Holger Conrad}, title = {Electrostatic all-silicon MEMS audio transducer for in-ear audio applications - acoustic measurements and modelling approach}, booktitle = {23rd International Congress on Acoustics, Aachen, Germany, 2019}, doi = {10.18154/RWTH-CONV-239893}, institution = {FG Mikro- und Nanosysteme}, type = {conferenceobject_noref}, pages = {6}, year = {2021}, }