@misc{ConradKaiserGaudetetal.2017, author = {Holger Conrad and Bert Kaiser and Matthieu Gaudet and Sergiu Langa and Michael Stolz and Sebastian Uhlig and Klaus Schimmanz and Harald Schenk}, title = {A novel electrostatic actuator class}, booktitle = {Procedia Engineering}, volume = {168}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.454}, institution = {FG Mikro- und Nanosysteme}, type = {articler}, pages = {1533 -- 1536}, year = {2017}, }