@misc{KolkovskyStuebnerLangaetal.2017, author = {Vladimir Kolkovsky and R. St{\"u}bner and Sergiu Langa and U. Wende and Bert Kaiser and Holger Conrad and Harald Schenk}, title = {Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique}, booktitle = {Solid-State Electronics}, volume = {123}, issn = {0038-1101}, doi = {10.1016/j.sse.2016.06.005}, institution = {FG Mikro- und Nanosysteme}, type = {articler}, pages = {89 -- 95}, year = {2017}, }