TY - GEN A1 - Conrad, Holger A1 - Schenk, Harald A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Stolz, Michael A1 - Lenz, Miriam T1 - A small-gap electrostatic micro-actuator for large deflections T2 - Nature Communications Y1 - 2016 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/15878 SN - 2041-1723 IS - 6 SP - 10078 ER -