@misc{ConradSchenkKaiseretal.2016, author = {Holger Conrad and Harald Schenk and Bert Kaiser and Sergiu Langa and Matthieu Gaudet and Klaus Schimmanz and Michael Stolz and Miriam Lenz}, title = {A small-gap electrostatic micro-actuator for large deflections}, booktitle = {Nature Communications}, number = {6}, issn = {2041-1723}, doi = {10.1038/ncomms10078}, institution = {FG Mikro- und Nanosysteme}, type = {articler}, pages = {10078}, year = {2016}, }