@inproceedings{BauerDreyerKahleetal.2007, author = {Monika Bauer and Christian Dreyer and Olaf Kahle and U. Schuldt and C. Uhlig and K. Schulze and Stefan E. Schulz and M. Uhlig and Thomas Geßner}, title = {Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization}, year = {2007}, }