@misc{SteinhaeusserTalaiKoelpinetal.2017, author = {Frank Steinh{\"a}ußer and Armin Talai and Alexander K{\"o}lpin and Robert Weigel and Achim Bittner and Ulrich Schmid}, title = {Permittivity Reduction and Surface Modification by Porosification of LTCC}, booktitle = {Ceramics International}, volume = {42}, number = {7}, issn = {0272-8842}, doi = {10.1016/j.ceramint.2016.02.149}, institution = {FG Elektronische Systeme und Sensorik}, type = {articler}, pages = {8925 -- 8931}, year = {2017}, }