@misc{TrieschmannRiesBibinovetal.2018, author = {Jan Trieschmann and Stefan Ries and Nikita Bibinov and Peter Awakowicz and Stanislav Mr{\´a}z and Jochen M. Schneider and Thomas Mussenbrock}, title = {Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma}, booktitle = {Plasma Sources Science and Technology}, volume = {27}, number = {5}, doi = {10.1088/1361-6595/aac23e}, institution = {FG Theoretische Elektrotechnik}, type = {articler}, pages = {14}, year = {2018}, }