TY - GEN A1 - Trieschmann, Jan T1 - Neutral Gas Simulation on the Influence of Rotating Spokes on Gas Rarefaction in High-Power Impulse Magnetron Sputtering T2 - Contributions to Plasma Physics Y1 - 2018 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/21954 SN - 1521-3986 VL - 58 IS - 5 SP - 394 EP - 403 ER -