@misc{SowińskaHenkelSchmeisseretal.2015, author = {Małgorzata Sowińska and Karsten Henkel and Dieter Schmeißer and Irina K{\"a}rkk{\"a}nen and Jessica Schneidewind and Franziska Naumann and Bernd Gruska and Hassan Gargouri}, title = {Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study}, booktitle = {Journal of Vacuum Science and Technology A}, number = {34}, issn = {0734-2101}, doi = {10.1116/1.4936227}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, pages = {01A127-1 -- 01A127-9}, year = {2015}, }