@misc{DasHenkelTallaridaetal.2015, author = {Chittaranjan Das and Karsten Henkel and Massimo Tallarida and Dieter Schmeißer and Hassan Gargouri and Irina K{\"a}rkk{\"a}nen and Jessica Schneidewind and Bernd Gruska and Michael Arens}, title = {Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties}, booktitle = {Journal of Vacuum Science and Technology A}, volume = {2015}, number = {33}, issn = {1520-8559}, doi = {10.1116/1.4903938}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, pages = {01A144-1 -- 01A144-8}, year = {2015}, }