@misc{SowinskaBrizziDasetal.2016, author = {Małgorzata Sowinska and Simone Brizzi and Chittaranjan Das and Irina K{\"a}rkk{\"a}nen and Jessica Schneidewind and Franziska Naumann and Hassan Gargouri and Karsten Henkel and Dieter Schmeißer}, title = {Analysis of nitrogen species in titanium oxynitride ALD films}, booktitle = {Applied Surface Science}, volume = {381}, issn = {0169-4332}, doi = {10.1016/j.apsusc.2016.02.096}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, pages = {42 -- 47}, year = {2016}, }