@misc{TaokaAsanoYamahaetal.2016, author = {Noriyuki Taoka and Takanori Asano and Takashi Yamaha and Tatsuya Terashima and Osamu Nakatsuka and Ioan Costina and Peter Zaumseil and Giovanni Capellini and Shigeaki Zaima and Thomas Schroeder}, title = {Non-uniform depth distributions of Sn concentration induced by Sn migration and desorption during GeSnSi layer formation}, booktitle = {Applied Physics Letters}, volume = {106}, issn = {1077-3118}, doi = {10.1063/1.4908121}, institution = {FG Halbleitermaterialien}, type = {articler}, pages = {061107-1 -- 061107-5}, year = {2016}, }