@inproceedings{GallianTrieschmannMussenbrocketal.2017, author = {Sara Gallian and Jan Trieschmann and Thomas Mussenbrock and William N. G. Hitchon and Ralf Peter Brinkmann}, title = {Analytic model of the energy distribution for energetic electrons in HiPIMS}, booktitle = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, doi = {10.1109/PLASMA.2015.7179892}, year = {2017}, }