TY - CONF A1 - Gallian, Sara A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas A1 - Hitchon, William N. G. A1 - Brinkmann, Ralf Peter T1 - Analytic model of the energy distribution for energetic electrons in HiPIMS T2 - 2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey Y1 - 2017 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/18226 SN - 978-1-4799-6974-6 PB - IEEE CY - Piscataway, NJ ER -