@misc{HeroldAcker2021, author = {Steven Herold and J{\"o}rg Acker}, title = {Lattice strain enhanced acidic etching on as cut sawn silicon wafer}, booktitle = {Materials Science in Semiconductor Processing}, volume = {123}, issn = {1873-4081}, doi = {10.1016/j.mssp.2020.105575}, url = {https://www.sciencedirect.com/science/article/abs/pii/S1369800120315080}, institution = {FG Physikalische Chemie}, type = {articler}, pages = {11}, year = {2021}, }